Materials Science Monographs
3 total works
Silicon Nitride in Electronics
by V.I. Belyi, etc., L.L. Vasilyeva, A.S. Ginovker, V.A. Gritsenko, S.M. Repinsky, S.P. Sinitsa, T.P. Smirnova, and F.L. Edelman
Published December 1988
This book is an English version, expanded and brought up to date, of the Russian book published in 1982. It has been written by a group of authors - chemists and physicists - and is designed particularly for specialists who are developing semiconductor devices. Silicon nitride has long been familiar as a material used in the process of manufacturing fire-proof products. During the past decade, it has come into use as a thin dielectric film in electronics, and at present silicon nitride synthesis underlies the basic technology for integrated circuits. The monograph discusses the characteristics that determine the process of synthesis of silicon nitride films, their structure, chemical composition, optical and electrophysical properties, as well as various applications of silicon nitride in electronics.
v. 76
Resists in Microlithography and Printing
by B. Bednar, etc., Jaroslav Kralicek, and Jaromir Zachoval
Published January 1993
Photoresists, electron and X-ray resists are generally mixtures based on organic polymers and radiation sensitive materials. Research and development of these mixtures is complicated and may be solved only in mutual collaboration between organic and physical chemistry, polymer chemistry, high energy and semiconductor chemistry and physics, as well as other branches of science. Research projects concerning the development, fabrication and application of resists necessitate systematic basic and applied research, increased effort on the part of research workers, and especially critical evaluation of the facts known to date and experimental results. All this has been borne in mind in the writing of this volume, the aim of which is to summarize and evaluate recent results of resist investigation and applications. Special attention is given to processes influencing the properties and quality of off-set plates, such as types of substrates and their coating, exposure, development, adhesion to substrate, hydrophobicity, etc.
v. 73
An intensifying interest from the scientific, technical, and industrial community in the new diamond technology can be attested to by the wide range of contributions in this proceedings volume. The papers discuss topics such as the applications of diamond films and related wide bandgap semiconductors and superhard materials. These materials are rapidly becoming economically significant due to their combination of superior properties: great hardness, high thermal conductivity, chemical inertness, high stiffness, high carrier mobilities, etc. Initial commercial products employing the new diamond technology are already on the market. These include diamond loudspeakers, diamond X-ray windows, diamond bonders, diamond cutting tools, and heads for magnetic disks coated with diamond-like carbon. The developments reported in this volume are important not only in terms of their own markets, but, also because they are expected to enable a wide range of other new products and production methods.