Electronics and Structures for MEMS II (Proceedings of SPIE, v. 4591)

by Neil W. Bergmann, Derek Abbott, Alex J. Hariz, and Vijay K. Varadan

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  • ISBN10 0819443212
  • ISBN13 9780819443212
  • Publish Date 1 January 2001
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Edition New ed.
  • Format Paperback
  • Pages 402
  • Language English