Micromachined Devices and Components VI (Proceedings of SPIE, v. 4176)

by Eric Peeters and Oliver Paul

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  • ISBN10 0819438324
  • ISBN13 9780819438324
  • Publish Date 1 January 2000
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 290
  • Language English