This is a superb state-of-the-art collection of contributed readings by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.
- ISBN13 9780070627352
- Publish Date 16 May 1998 (first published 16 October 1996)
- Publish Status Out of Print
- Out of Print 7 April 2008
- Publish Country US
- Publisher McGraw-Hill Education - Europe
- Imprint McGraw-Hill Professional
- Edition 2nd edition
- Format Hardcover
- Pages 676
- Language English