This text focuses on the methods used to achieve successful results in manufacturing advanced semiconductors. It covers such topics as: computer integrated manufacturing (CIM); maximizing equipment productivity; inline inspection for defect reduction; and manufacturing cost reduction techniques.
- ISBN10 0780333713
- ISBN13 9780780333710
- Publish Date 30 April 1997
- Publish Status Active
- Publish Country US
- Imprint I.E.E.E.Press
- Format Paperback
- Pages 490
- Language English