These proceedings cover: factory design; manufacturing strategy, control and execution; defect reduction and yield enhancement; ultra clean technology; process and metrology equipment; process and material optimization; and environemnt, safety and health.
- ISBN10 0780354036
- ISBN13 9780780354036
- Publish Date 31 October 1999
- Publish Status Active
- Publish Country US
- Imprint I.E.E.E.Press
- Edition 1999 ed.
- Format Paperback
- Pages 482
- Language English