Handbook of Silicon Wafer Cleaning Technology

by Karen A. Reinhardt and Werner Kern

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  • ISBN10 0815517718
  • ISBN13 9780815517719
  • Publish Date December 2008
  • Publish Status Active
  • Publish Country US
  • Imprint William Andrew Publishing
  • Edition 2nd Revised edition
  • Format eBook
  • Pages 817
  • Language English