Semiconductor Characterization: Present Status and Future Needs

by W.Murray Bulis and etc.

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This book serves as a baseline reference for the characterization of semiconductors for the next decade. It includes sections devoted to characterization for silicon IC development and manufacturing and for III-V compound semiconductor materials, devices, and manufacturing. This book acts as a reference or sourcebook for industry, government and academia who are interested in the reviews and state-of-the-art knowledge presented on semiconductor issues pertaining to the subject of semiconductor characterization for semiconductor research, development, and manufacturing.
  • ISBN10 1563965038
  • ISBN13 9781563965036
  • Publish Date 11 January 1996
  • Publish Status Active
  • Out of Print 2 June 2021
  • Publish Country US
  • Imprint American Institute of Physics
  • Format Hardcover
  • Pages 744
  • Language English