Manufacturable Process/Tool for high-κ/metal gate

by Aarthi Venkateshan and Rajendra Singh

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  • ISBN10 3836481561
  • ISBN13 9783836481564
  • Publish Date 6 November 2008
  • Publish Status Active
  • Publish Country DE
  • Imprint VDM Verlag
  • Format Paperback (US Trade)
  • Pages 204
  • Language English