Mechanical resonator for hermeticity evaluation of RF MEMS wafer-level packages

by Dr Sebastian Fischer

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  • ISBN10 363870095X
  • ISBN13 9783638700955
  • Publish Date 6 August 2007
  • Publish Status Active
  • Imprint Grin Verlag
  • Format Paperback (US Trade)
  • Pages 130
  • Language English