Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV (Proceedings of SPIE, v. 7269)

by Jung-Chih Chiao, Alex J. Hariz, David V. Thiel, and Changyi Yang

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  • ISBN10 0819475211
  • ISBN13 9780819475213
  • Publish Date 1 January 2008
  • Publish Status Active
  • Out of Print 11 May 2017
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Language English