Micromachining and Microfabrication Process Technology XIV (Proceedings of SPIE, v. 7204)

by Mary-Ann Maher, Jung-Chih Chiao, and Paul J. Resnick

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  • ISBN10 0819474509
  • ISBN13 9780819474506
  • Publish Date 1 January 2009
  • Publish Status Active
  • Out of Print 11 May 2017
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Language English