Anomalous Current and Voltage Fluctuations in High Power Impulse Magnetron Sputtering

by Scott Kirkpatrick

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  • ISBN10 1243628170
  • ISBN13 9781243628176
  • Publish Date 1 September 2011
  • Publish Status Unknown
  • Publish Country US
  • Imprint Proquest, Umi Dissertation Publishing
  • Format Paperback (US Trade)
  • Pages 318
  • Language English