Materials and Device Characterization in Micromachining III (Proceedings of SPIE, v. 4175)

by Yuli Vladimirsky and Philip J. Coane

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  • ISBN10 0819438316
  • ISBN13 9780819438317
  • Publish Date 1 January 2000
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 210
  • Language English