Emerging Lithographic Technologies II: 23-25 February 1998, Santa Clara, California

by Society of Photo-Optical Instrumentation Engineers, Semiconductor Equipment and Materials International, and Yuli Vladimirsky

Yuli Vladimirsky (Editor)

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  • ISBN10 0819427764
  • ISBN13 9780819427762
  • Publish Date 1 January 1998
  • Publish Status Active
  • Out of Print 1 October 2008
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 702
  • Language English