Advances in Resist Materials and Processing Technology

by Robert D. Allen

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  • ISBN10 0819485314
  • ISBN13 9780819485311
  • Publish Date 15 June 2011
  • Publish Status Unknown
  • Out of Print 11 May 2017
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 870
  • Language English