This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
- ISBN10 3527296344
- ISBN13 9783527296347
- Publish Date 16 January 2001
- Publish Status Out of Print
- Out of Print 5 May 2011
- Publish Country DE
- Imprint Wiley-VCH Verlag GmbH
- Edition 2nd Revised edition
- Format Hardcover
- Pages 512
- Language English