For 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments; can also be used for industry courses in RF Power.
This text, the only one of its kind on the market, focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for processing wafers. The emphasis is on equipment and circuits related to RF power in manufacturing equipment tools such as etchers and chemical vapor deposition, among others. This is a useful book that provides a base upon which a student can pursue more equipment-specific knowledge.
- ISBN10 0130965774
- ISBN13 9780130965776
- Publish Date 16 December 2003
- Publish Status Out of Print
- Out of Print 27 November 2015
- Publish Country US
- Imprint Pearson
- Format Hardcover
- Pages 288
- Language English