Vacuum Technology for Semiconductor Manufacturing

by D J Henry

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  • ISBN10 0130213225
  • ISBN13 9780130213228
  • Publish Date 28 November 2006
  • Publish Status Out of Print
  • Out of Print 15 March 2021
  • Publish Country US
  • Imprint Pearson
  • Format Hardcover
  • Pages 512
  • Language English