Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applicatons

by David Cameron and Arthur Sherman

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  • ISBN10 1299619126
  • ISBN13 9781299619128
  • Publish Date 1 January 2013
  • Publish Status Active
  • Out of Print 25 February 2015
  • Publish Country US
  • Imprint Wiley-Scrivener
  • Edition 2nd Revised ed.
  • Format eBook
  • Language English