This research book reviews the important recent advances in the rapidly expanding III-V field. A complete reference that examines the fundamental aspects of different etching systems and their suitability in major application areas. Each system is classified according to mechanism and kinetics.
- ISBN10 0946395845
- ISBN13 9780946395842
- Publish Date February 1991
- Publish Status Out of Print
- Out of Print 10 August 2001
- Publish Country GB
- Publisher Elsevier Science & Technology
- Imprint Elsevier Advanced Technology
- Format Hardcover
- Pages 363
- Language English