Microbiochips Monolithically Integrated with Microfluidics, Micromechanics, Photonics & Electronics by 3D Femtosecond Laser Direct Writing

by Ya Cheng, Zhizhan Xu, Koji Sugioka, and Katsumi Midorikawa

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Microbiochips, such as a lab-on-a-chip (LOC) devices and micro total analysis systems, can be regarded conceptually as a biological equivalent of conventional silicon integrated circuits, which involve miniaturization and integration of electronics. As its name implies, an ideal LOC should have a very small footprint and yet still be capable of functioning as a laboratory in which partial or complete chemical or biological analysis can be performed automatically. This book provides an overview of 3D femtosecond laser direct writing technology and highlight its potential for fabrication of complex smart microsystems by furnishing some examples of fabrication and hybrid integration of microfluidics, micromechanics, photonics, and electronics.
  • ISBN10 1617282790
  • ISBN13 9781617282799
  • Publish Date 25 October 2011
  • Publish Status Active
  • Publish Country US
  • Imprint Nova Science Publishers Inc
  • Format Paperback
  • Pages 67
  • Language English