Micromachining and Microfabrication Process Technology XVI

by Mary-Ann Maher

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  • ISBN10 0819484636
  • ISBN13 9780819484635
  • Publish Date 29 August 2012
  • Publish Status Active
  • Out of Print 11 May 2017
  • Publish Country US
  • Imprint SPIE Press
  • Edition New ed.
  • Pages 158
  • Language English