This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself.The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.
- ISBN10 6613143553
- ISBN13 9786613143556
- Publish Date 2 November 2010 (first published 1 January 2010)
- Publish Status Active
- Out of Print 28 September 2011
- Publish Country US
- Imprint World Scientific Publishing Company
- Format eBook
- Pages 416
- Language English