Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [Sic] in Integrated Circuit Device Manufacturing

by S Raghavan, Robert Leon Opila, and L Zhang

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  • ISBN10 156677201X
  • ISBN13 9781566772013
  • Publish Date 30 October 1999
  • Publish Status Out of Print
  • Out of Print 18 November 2014
  • Publish Country US
  • Imprint Electrochemical Society
  • Format Hardcover
  • Pages 274
  • Language English