This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.
- ISBN13 9783030225971
- Publish Date 30 July 2019
- Publish Status Active
- Publish Country CH
- Imprint Springer Nature Switzerland AG
- Edition 1st ed. 2019
- Format Hardcover
- Pages 274
- Language English