This book is designed to introduce typical cleanroom processes, techniques, and their fundamental principles. It is written for the practicing scientist or engineer, with a focus on being able to transition the information from the book to the laboratory. Basic theory such as electromagnetics and electrochemistry is described in as much depth as necessary to understand and explain the current practice and their limitations. Examples from various areas of interest will be covered, such as the fabrication of photonic devices including photo detectors, waveguides, and optical coatings, which are not commonly found in other fabrication texts.
- ISBN13 9781498725590
- Publish Date 26 October 2016 (first published 21 October 2016)
- Publish Status Active
- Publish Country GB
- Publisher Taylor & Francis Ltd
- Imprint CRC Press
- Format eBook
- Pages 299
- Language English