Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges.
Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.
- ISBN10 6611020543
- ISBN13 9786611020545
- Publish Date 30 December 2003 (first published 1 January 2003)
- Publish Status Active
- Out of Print 22 June 2011
- Publish Country US
- Imprint Elsevier Science & Technology
- Format eBook
- Pages 464
- Language English