This book focuses on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. It discusses the obstacles any new technology must overcome to be commercially successful with specific references to the challenges confronting Silicon-Molecular Beam Epitaxy.
- ISBN10 1315897520
- ISBN13 9781315897523
- Publish Date 14 December 2017 (first published 13 December 2017)
- Publish Status Active
- Publish Country GB
- Publisher Taylor & Francis Ltd
- Imprint CRC Press
- Format Hardcover
- Pages 306
- Language English