For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.
Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
- ISBN10 1299941133
- ISBN13 9781299941137
- Publish Date 1 January 2014 (first published 10 May 2011)
- Publish Status Active
- Out of Print 27 May 2015
- Publish Country US
- Imprint Pearson Education
- Edition Revised ed.
- Format eBook
- Pages 577
- Language English