Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
- ISBN13 9780306450549
- Publish Date 31 May 1997
- Publish Status Active
- Publish Country US
- Publisher Springer Science+Business Media
- Imprint Kluwer Academic/Plenum Publishers
- Edition 1997 ed.
- Format Hardcover
- Pages 358
- Language English