This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.
- ISBN10 0815518978
- ISBN13 9780815518976
- Publish Date December 1998 (first published 31 December 1995)
- Publish Status Active
- Publish Country US
- Publisher William Andrew Publishing
- Imprint Noyes Publications
- Format eBook
- Pages 362
- Language English