A collection of 40 papers on microelectronic device technology. It addresses: dielectrics/gate technology; source/drain junctions and salicide; integration and manufacturability; and other issues.
- ISBN13 9780819429650
- Publish Date 1 September 1998
- Publish Status Active
- Publish Country US
- Imprint SPIE Press
- Format Paperback
- Pages 364
- Language English